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Fluidized bed reactor (FB-CVD) belongs to one of the company's star products. Powder materials form a fluidized state in the reactor for processes such as cladding and sintering. The CVD process with fluidized bed as the reactor has the characteristics of uniform coating and so on. It is suitable for fluidization of powder materials with D50=2~1000μm.
Wider range of coverings
The Fluidized Bed Spray Nanocoating (FB-SDNC) reaction system combines fluidized bed reactor technology with spray drying technology: soluble capping materials are dissolved and sprayed in the liquid phase to coat materials that have achieved a fully fluidized state in the carrier gas. The integration of the two technologies enables process-efficient, thickness-controlled deposition of the coating, thus enhancing the industrialized material coating capability and achieving good modification.
Deposition process with high aspect ratio
FB-ALD is a new type of deposition method developed in conjunction with a national special team and based on chemical vapor deposition (CVD), where the deposit is deposited on the surface of the substrate in the form of a single layer of atoms. Because FB-ALD can achieve uniform deposition with atomic-level precision, it is particularly suitable for deposition processes with high depth-to-width ratios.FB-ALD technology has been commonly used in advanced manufacturing industries such as semiconductor and photovoltaic, but the traditional FB-ALD process is only applicable to deposition processes for sheet materials.
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